NEMS, i.e. “Nanoelectromechanical Systems”, are used for the devices integrating mechanical and electrical functionality on the nanoscale. NEMS is the advanced level of miniaturization after MEMS devices. NEMS includes various devices like sensors, actuators, gears, accelerometers, cantilevers, tweezers, and many other nano devices. Different properties of the NEMS-based devices, which makes them unique are low mass, high electrical strength, high mechanical resonance frequencies, potentially large quantum mechanical effects such as zero point motion and a high surface-to-volume ratio useful for surface-based sensing mechanisms.